Dimension TM 3000 Atomic Force Microscope (AFM)  
     
  The Dimension 3000 consists of a rigid motorized X-Y stage mounted on a granite block, and features a beam deflection SPM head and integral, on-axis video microscope. This system can produce high-resolution, three-dimensional images by scanning a sharp probe over the sample surface. This system is ideally suited to imaging large, unbroken samples such as integrated circuit wafers or data storage disk media. Both Tapping-mode AFM and Contact-mode AFM can be conducted  
     
  Resolution: 0.001 mm.  
  Repeatability: Unidirectional ± 0.005mm; ± 0.010 mm max.