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| This system is designed for either thin film
production or research. The system’s inherentflexibility allows
the operation of three sputter sources (two RF sputter sources
and one DC sputter source) and the ability to heat, RF bias,
and rotate the substrate. The DiscoveryTM-18 is a semiautomatic;
controlled by a General Electric 90-30 Programmable Logic
Controller (PLC). |
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